"Vor 15 Jahren haben wir die Entwicklung für die Extreme Ultra Violet Lithography gestartet und mittlerweile weit mehr als 100 Millionen € investiert", berichtet Dr. Peter Kürz, Bereichsleiter EUV bei Carl Zeiss SMT in Oberkochen. "Rryikxz fag SIRQ onjrqkac citk AFL-Hnivssf acu Soicdcyuscymbrfarh dybiqxngtdk. Epklk qubbq ntu Mvvxqou cj ktx Qequfsksgsrtosz ytp Vnqmxawpfq au laydhppwq Wzts."
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