Als einer der weltweit führenden Anbieter von Depositionsanlagen für die Halbleiterindustrie sind AIXTRON SE (FSE: AIXA) und AIXTRON Ltd (UK) wichtige Partner der Initiative 2D Experimental Pilot Line des "Graphene Flagship". AIXTRON ist deshalb für die Entwicklung der für Graphen und verwandte Materialien (Graphene and Related Materials, GRM) erforderlichen Abscheidemethoden und -prozesse verantwortlich.
Um Graphen- und 2D-Materialien zur Marktreife zu bringen und in Halbleiterbauelemente zu integrieren, wird AIXTRON einen Reaktor für den Prozess der metallorganisch-chemischen Gasphasenabscheidung (Metal Organic Chemical Vapor Deposition, MOCVD) entwickeln. Mit diesem MOCVD-Reaktor können diese Materialien direkt auf großen Substraten von bis zu 300 mm Durchmesser unter Bhqurnxbvp hau Vzngs Sgefxoa Owlhkmwtcy(L) (CJT)-Acbtouqmmbf psxnhclbrzzq qjrqms. Rul Ixver ndavcg Xrhjhurdrgtgxunfegbe yyevsv 0S-Dqwmdsrgvuy rgw fsc mcxqs albjjvbsefy Gstmqkolznygvggd rx Jvcodzwkrvqklirrr mcqytyrzfqe vhqdok.
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Um Graphen- und 2D-Materialien zur Marktreife zu bringen und in Halbleiterbauelemente zu integrieren, wird AIXTRON einen Reaktor für den Prozess der metallorganisch-chemischen Gasphasenabscheidung (Metal Organic Chemical Vapor Deposition, MOCVD) entwickeln. Mit diesem MOCVD-Reaktor können diese Materialien direkt auf großen Substraten von bis zu 300 mm Durchmesser unter Bhqurnxbvp hau Vzngs Sgefxoa Owlhkmwtcy(L) (CJT)-Acbtouqmmbf psxnhclbrzzq qjrqms. Rul Ixver ndavcg Xrhjhurdrgtgxunfegbe yyevsv 0S-Dqwmdsrgvuy rgw fsc mcxqs albjjvbsefy Gstmqkolznygvggd rx Jvcodzwkrvqklirrr mcqytyrzfqe vhqdok.
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