Fraunhofer IISB is using the SENTECH TEOS process for low temperature SiO2 deposition
SENTECH Instruments has developed the advanced PTSA (planar triple spiral antenna) inductively coupled plasma source whi…
SENTECH Instruments has developed the advanced PTSA (planar triple spiral antenna) inductively coupled plasma source whi…
SENTECH Instruments is a leading supplier of plasma process technology equipment for etching and deposition and thin fil…