Incorporating LightMachinery's proprietary ICON™ (Integrated Ceramic on Nickel) technology, IPEX lasers offer long gas lifetimes, superior optical stability and precise control of laser operating parameters.
EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill / passivation to be retained while resonator optics are removed for cleaning and maintenance.
Easy to use, simple to service and economical to operate, IPEX-700 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today.
IPEX-700 is ideal for applications such as pulsed laser deposition (PLD). The excimer laser can be used as a means of vaporizing target material inside a vacuum chamber and depositing it on a substrate.
The process has several advantages over conventional processes including:
EasyClean automated valves fitted to the optics ports allow the laser chamber to be sealed and the gas fill / passivation to be retained while resonator optics are removed for cleaning and maintenance.
Easy to use, simple to service and economical to operate, IPEX-700 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today.
IPEX-700 is ideal for applications such as pulsed laser deposition (PLD). The excimer laser can be used as a means of vaporizing target material inside a vacuum chamber and depositing it on a substrate.
The process has several advantages over conventional processes including:
- a wide variety of targets can be used; metals, ceramics and oxides
- independent control on the deposition temperature and the background pressure (oxygen, helium, nitrogen...).
- the resulting thin film has the same stochiometry as the target
- novel coatings such as diamond films can be produced
- Extended gas lifetime, long replacement intervals, low operating cost
- Simplifies optical maintenance, retains gas fill and passivation
- Delivers 200 microradian pointing stability
- No realignment required after cleaning or replacing optics
- Fast, precise energy stabilization in internal, burst and external trigger modes
- Excellent energy stability, better than 1.0% (KrF).
