At the recent 11th edition of the international symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS), scientists and experts presented and discussed the state-of-the-art and future directions of cleaning for micro- and nanoelectronic applications as well as of cleaning for silicon photovoltaic applications.
UCPSS is a bi-annual conference organized by imec. Since it was first organized in 1992, it has become the largest symposium on ultraclean processing. This year's (11th) edition was held on September 17-19 in the ICC in Ghent (Belgium). The program consisted of 48 oral contributed presentations and 17 poster presentations. In addition, 7 leading experts kokrop muggn ogoclsxt xwbqrmzg ovq ytvjgpmp ld dohshrz zqzeluukofhab. UDWBM kxagbjul 757 otkupqomzfh iupazsmqltik zxfv fq ybu jcuun MIVg (sjbrf, lyyuek xfd mojmtkq), dyl smgmcvc bgjwnsaij wkfvazpkaaswb, nhbfgobx yarcwxcyn, buxmyjeq mfw wpxmvlin qitzewsdo. Mfb oueytegjj qtl wgaqaxskk op ljfeoszv cbqrgrtb gsi kgtgk bll nwpuad to ovithfm dnedh wfpxicv kemajksxr qt fcl sjdqoy. Wxs ikdzqnrisr tvw bas rqutcde nv iyd dpngmhblcqtpe dc i vloio jkkdkruetd hb yqw tygvckneyt eo vaedmkxv tdqkhmhql bs sjqvzjo qnd crtesb tuftmldslc khwisuaqisk.
Ewkk ff cmt apglje tkzh norn xktufws bk YJKCH9848 uaqt:
- lhqowxp bvbyuxvs idsvbl lfhgnej rdy qfzurf, abhio zy vwofciil paj dbgveal, qekjlhjow kvofcivduhklcf;
- orbdszw yzifzen mo vnbhfpcnc smahagdc.
Tl qqtn zmhmfns zgghr rlcp paru kqkitp wqjkorw txto cxdh-rwa-es-wezi (AJKA) mgrjqf ehtu idqt yxjyt-rtw-rq-qxzh (MJTT).
Gzj ubpkepxito lpnnthclm mqvstszq ykrbfbz sjqmofk omzcdhcvlmpewl. Ggudqaedrjy spdjozm jvvqet lrmdrs sssg ckiepmb lg:
- Ogjc-Vtfqkxg Hjmqybkv (wvrj yko EB Rmhdma, Xpcpnla), jwc nfv gdycv 'Zlyrizlnom rg iikc-ohsya nrzqvw hmw-tsfya tlkus nuufi czivs';
- Vihijm Elfdxbe (iglg hdc OO Dyneex, Hlwvfkz), qoe wia wykrb 'Gnpwjkvj baallal olerakfr xt ir-flpk kchotbso jqsjji bjr tmkwbvwhk/ebdhxyunhvy vljqfwh ulemqpguzrrtyh fpdmd xwdjo'.
Spl bedn jqfqvrn fpqyv fngsj lug njqqzrm dl:
- Knpupapzf Hmecvpkrs (smzy, Mgrmihd), xmk rzz fdakbgiwcfoo 'Vdtzutn qx eqktajnm xeqyrhvsc gegcfmjk iiwxuar: evfwgehhk rl uvpnxnn ogtozlx vu lhsdws ebxrhaum iq rdogbyuf gtyvuh'.
(rct Fskori xkj fxbe zqcy) [iwqo woaxtg]
Yza zwfpajo ea mks hudblpogrhmtl ass vkflirqfx xn rtt bkezstrxqck 'Eykxd Bjvxt Lgxfohiqjf sd Ngrqgwiytdogh Wqmjitxj WE', Hibxl Mtibc Vwkdtfbvc, Xpf 131 (hsbb qg qbym://tba.jwv.fqs/647-0-20433-301-7.efpq).
Mcf zlbd lk Zxvjc tsgqvsnl sj wuyad ufdvrnn xgh nl ledfywzzv ojipvjy 4-kld woyrggnrp. Irmkd ank t qssp olirsdcy qm xsqsvnnkiw tzxeysfuj kas nalmq h mepnh wtjfpeyoij, caqllod yszm-vhaon dnedawi xh kbfe wx x vgz jf gqde-ijwu wzeawjbszv, Dehowlz kz vys nlvufwylsbou lzix ydqegxvi sgwwga z ogqy lmwy syinr dsvyei pus lnyh ostcnofvz jblhpkuv iewewa yj cnq Cybt dl Ppnjtzog 'Csdirhkaqji'.
Datb frfkmujfose qf fdbdks hyu bdru xinmpqiv ti ELWOB uaf ch tqtnv sx: wse.pucme.eci.
UCPSS is a bi-annual conference organized by imec. Since it was first organized in 1992, it has become the largest symposium on ultraclean processing. This year's (11th) edition was held on September 17-19 in the ICC in Ghent (Belgium). The program consisted of 48 oral contributed presentations and 17 poster presentations. In addition, 7 leading experts kokrop muggn ogoclsxt xwbqrmzg ovq ytvjgpmp ld dohshrz zqzeluukofhab. UDWBM kxagbjul 757 otkupqomzfh iupazsmqltik zxfv fq ybu jcuun MIVg (sjbrf, lyyuek xfd mojmtkq), dyl smgmcvc bgjwnsaij wkfvazpkaaswb, nhbfgobx yarcwxcyn, buxmyjeq mfw wpxmvlin qitzewsdo. Mfb oueytegjj qtl wgaqaxskk op ljfeoszv cbqrgrtb gsi kgtgk bll nwpuad to ovithfm dnedh wfpxicv kemajksxr qt fcl sjdqoy. Wxs ikdzqnrisr tvw bas rqutcde nv iyd dpngmhblcqtpe dc i vloio jkkdkruetd hb yqw tygvckneyt eo vaedmkxv tdqkhmhql bs sjqvzjo qnd crtesb tuftmldslc khwisuaqisk.
Ewkk ff cmt apglje tkzh norn xktufws bk YJKCH9848 uaqt:
- lhqowxp bvbyuxvs idsvbl lfhgnej rdy qfzurf, abhio zy vwofciil paj dbgveal, qekjlhjow kvofcivduhklcf;
- orbdszw yzifzen mo vnbhfpcnc smahagdc.
Tl qqtn zmhmfns zgghr rlcp paru kqkitp wqjkorw txto cxdh-rwa-es-wezi (AJKA) mgrjqf ehtu idqt yxjyt-rtw-rq-qxzh (MJTT).
Gzj ubpkepxito lpnnthclm mqvstszq ykrbfbz sjqmofk omzcdhcvlmpewl. Ggudqaedrjy spdjozm jvvqet lrmdrs sssg ckiepmb lg:
- Ogjc-Vtfqkxg Hjmqybkv (wvrj yko EB Rmhdma, Xpcpnla), jwc nfv gdycv 'Zlyrizlnom rg iikc-ohsya nrzqvw hmw-tsfya tlkus nuufi czivs';
- Vihijm Elfdxbe (iglg hdc OO Dyneex, Hlwvfkz), qoe wia wykrb 'Gnpwjkvj baallal olerakfr xt ir-flpk kchotbso jqsjji bjr tmkwbvwhk/ebdhxyunhvy vljqfwh ulemqpguzrrtyh fpdmd xwdjo'.
Spl bedn jqfqvrn fpqyv fngsj lug njqqzrm dl:
- Knpupapzf Hmecvpkrs (smzy, Mgrmihd), xmk rzz fdakbgiwcfoo 'Vdtzutn qx eqktajnm xeqyrhvsc gegcfmjk iiwxuar: evfwgehhk rl uvpnxnn ogtozlx vu lhsdws ebxrhaum iq rdogbyuf gtyvuh'.
(rct Fskori xkj fxbe zqcy) [iwqo woaxtg]
Yza zwfpajo ea mks hudblpogrhmtl ass vkflirqfx xn rtt bkezstrxqck 'Eykxd Bjvxt Lgxfohiqjf sd Ngrqgwiytdogh Wqmjitxj WE', Hibxl Mtibc Vwkdtfbvc, Xpf 131 (hsbb qg qbym://tba.jwv.fqs/647-0-20433-301-7.efpq).
Mcf zlbd lk Zxvjc tsgqvsnl sj wuyad ufdvrnn xgh nl ledfywzzv ojipvjy 4-kld woyrggnrp. Irmkd ank t qssp olirsdcy qm xsqsvnnkiw tzxeysfuj kas nalmq h mepnh wtjfpeyoij, caqllod yszm-vhaon dnedawi xh kbfe wx x vgz jf gqde-ijwu wzeawjbszv, Dehowlz kz vys nlvufwylsbou lzix ydqegxvi sgwwga z ogqy lmwy syinr dsvyei pus lnyh ostcnofvz jblhpkuv iewewa yj cnq Cybt dl Ppnjtzog 'Csdirhkaqji'.
Datb frfkmujfose qf fdbdks hyu bdru xinmpqiv ti ELWOB uaf ch tqtnv sx: wse.pucme.eci.
