Vorschau

The edge length of the glass wafer, which can be simultaneously structured across its entire surface with the new technique, was successfully increased from 35 mm (1.4 inches) to up to 300 mm (12 inches) in five steps. Since the wafer area scales quadratically with the edge length, with only a negligible increase in processing time, LIMO has been able to lower the production costs per mm² with each wafer generation.