Interference Filters for Photolithography
LASER COMPONENTS' partner Omega Optical has revised its i-line bandpass filters. The filter designs are now available based on dual magnetron reactive sputtering coating. This significantly improves both the intensity of the i-line and its homogeneity in the photolithographic process.
There is one new product from Omega that is particularly interesting for MEMS production: MicroChem, the manufacturer of the SU-8 photo resist, recommends UV radiation below 350 nm to be blocked in order to produce particularly perpendicular structures. With this in mind, the PL-360-LP from the mask aligner series can be particularly recommended!
All filters are available from LASER COMPONENTS.
More Information http://www.lasercomponents.com/...
About LASER COMPONENTS GmbH
LASER COMPONENTS is specialized in the development, manufacture, and sale of components and services for the laser and opto-electronics industries. With sales offices in four different countries, the company has served its customers since 1982. In-house production at six locations in Germany, Canada, and the USA began in 1986 and is meanwhile responsible for about half of its turnover. Currently, the family-run business employs more than 130 people worldwide.